发明授权
- 专利标题： Methods of making jogged layout routings double patterning compliant
- 专利标题（中）： 制作慢跑布局布线的方法双重图案化
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申请号： US13418895申请日： 2012-03-13
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公开(公告)号： US08802574B2公开(公告)日： 2014-08-12
- 发明人: Lei Yuan , Jongwook Kye
- 申请人： Lei Yuan , Jongwook Kye
- 申请人地址： KY Grand Cayman
- 专利权人： GLOBALFOUNDRIES Inc.
- 当前专利权人： GLOBALFOUNDRIES Inc.
- 当前专利权人地址： KY Grand Cayman
- 代理机构： Amerson Law Firm, PLLC
- 主分类号： H01L21/302
- IPC分类号： H01L21/302
摘要：
One illustrative method disclosed herein involves creating an overall target pattern that includes an odd-jogged feature with a crossover region that connects first and second line portions, wherein the crossover region has a first dimension in a first direction that is greater than a second dimension that is transverse to the first direction, decomposing the overall target pattern into a first sub-target pattern and a second sub-target pattern, wherein each of the sub-target patterns comprise a line portion and a first portion of the crossover region, and generating first and second sets of mask data corresponding to the first and second sub-target patterns, respectively.