发明授权
- 专利标题： Systems and methods for the crystallization of thin films
- 专利标题（中）： 用于薄膜结晶的系统和方法
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申请号： US13129219申请日： 2009-11-13
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公开(公告)号： US08802580B2公开(公告)日： 2014-08-12
- 发明人: James S. Im
- 申请人： James S. Im
- 申请人地址： US NY New York
- 专利权人： The Trustees of Columbia University in the City of New York
- 当前专利权人： The Trustees of Columbia University in the City of New York
- 当前专利权人地址： US NY New York
- 代理机构： Wilmer Cutler Pickering Hale and Dorr LLP
- 国际申请： PCT/US2009/064381 WO 20091113
- 国际公布： WO2010/056990 WO 20100520
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
Crystallization of thin films using pulsed irradiation The method includes continuously irradiating a film having an x-axis and a y-axis, in a first scan in the x-direction of the film with a plurality of line beam laser pulses to form a first set of irradiated regions, translating the film a distance in the y-direction of the film, wherein the distance is less than the length of the line beam, and continuously irradiating the film in a second scan in the negative x-direction of the film with a sequence of line beam laser pulses to form a second set of irradiated regions, wherein each of the second set of irradiated regions overlaps with a portion of the first set of irradiated regions, and wherein each of the first and the second set of irradiated regions upon cooling forms one or more crystallized regions.
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