发明授权
US08803124B2 Creating an embedded reram memory from a high-K metal gate transistor structure
有权
从高K金属栅极晶体管结构创建嵌入式reram存储器
- 专利标题: Creating an embedded reram memory from a high-K metal gate transistor structure
- 专利标题(中): 从高K金属栅极晶体管结构创建嵌入式reram存储器
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申请号: US13407997申请日: 2012-02-29
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公开(公告)号: US08803124B2公开(公告)日: 2014-08-12
- 发明人: Dipankar Pramanik , Tony P. Chiang , David Lazovsky
- 申请人: Dipankar Pramanik , Tony P. Chiang , David Lazovsky
- 申请人地址: US CA San Jose
- 专利权人: Intermolecular, Inc.
- 当前专利权人: Intermolecular, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: H01L47/00
- IPC分类号: H01L47/00
摘要:
An embodiment of the present invention sets forth an embedded resistive memory cell that includes a first stack of deposited layers, a second stack of deposited layers, a first electrode disposed under a first portion of the first stack, and a second electrode disposed under a second portion of the first stack and extending from under the second portion of the first stack to under the second stack. The second electrode is disposed proximate to the first electrode within the embedded resistive memory cell. The first stack of deposited layers includes a dielectric layer, a high-k dielectric layer disposed above the dielectric layer, and a metal layer disposed above the high-k dielectric layer. The second stack of deposited layers includes a high-k dielectric layer formed simultaneously with the high-k dielectric layer included in the first stack, and a metal layer disposed above the high-k dielectric layer.
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