发明授权
- 专利标题: Unit of optical modulator, optical modulator including the same, and method of fabricating the optical modulator
- 专利标题(中): 光调制器单元,包括其的光调制器,以及制造光调制器的方法
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申请号: US13531964申请日: 2012-06-25
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公开(公告)号: US08804226B2公开(公告)日: 2014-08-12
- 发明人: Sang-hun Lee , Chang-young Park , Jo-ho Lee
- 申请人: Sang-hun Lee , Chang-young Park , Jo-ho Lee
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Sughrue Mion, PLLC
- 优先权: KR10-2011-0096984 20110926
- 主分类号: G02F1/03
- IPC分类号: G02F1/03 ; B29D11/00
摘要:
An optical modulator unit, an optical modulator, and a method of fabricating are provided. The optical modulator unit includes a first contact layer transmitting infrared rays, a lower reflection layer disposed on the first contact layer, an active layer, including a multiple quantum well, disposed on the lower reflection layer, and an upper reflection layer disposed on the active layer. The optical modulator includes a plurality of optical modulator units sharing the first contact layer. The method includes sequentially stacking a first contact layer, a lower reflection layer, an active layer, an upper reflection layer, and a second contact layer on a substrate; etching the second contact layer, the upper reflection layer, the active layer, and the lower reflection layer, exposing a surface of the first contact layer; forming a first electrode on the first contact layer; and forming a second electrode on the second contact layer.