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US08806386B2 Customized patterning modulation and optimization 有权
定制图案调制和优化

Customized patterning modulation and optimization
Abstract:
The present disclosure provides one embodiment of an integrated circuit (IC) design method. The method includes providing an IC design layout of a circuit; applying an electrical patterning (ePatterning) modification to the IC design layout according to an electrical parameter of the circuit and an optical parameter of IC design layout; and thereafter fabricating a mask according to the IC design layout.
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