Invention Grant
- Patent Title: Customized patterning modulation and optimization
- Patent Title (中): 定制图案调制和优化
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Application No.: US12625749Application Date: 2009-11-25
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Publication No.: US08806386B2Publication Date: 2014-08-12
- Inventor: Ying-Chou Cheng , Ru-Gun Liu , Josh J. H. Feng , Tsong-Hua Ou , Luke Lo , Chih-Ming Lai , Wen-Chun Huang
- Applicant: Ying-Chou Cheng , Ru-Gun Liu , Josh J. H. Feng , Tsong-Hua Ou , Luke Lo , Chih-Ming Lai , Wen-Chun Huang
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
The present disclosure provides one embodiment of an integrated circuit (IC) design method. The method includes providing an IC design layout of a circuit; applying an electrical patterning (ePatterning) modification to the IC design layout according to an electrical parameter of the circuit and an optical parameter of IC design layout; and thereafter fabricating a mask according to the IC design layout.
Public/Granted literature
- US20110124193A1 CUSTOMIZED PATTERNING MODULATION AND OPTIMIZATION Public/Granted day:2011-05-26
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