发明授权
- 专利标题: Coating device
- 专利标题(中): 涂装装置
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申请号: US13251468申请日: 2011-10-03
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公开(公告)号: US08807072B2公开(公告)日: 2014-08-19
- 发明人: Futoshi Shimai , Tsutomu Sahoda , Akihiko Sato , Kenji Maruyama
- 申请人: Futoshi Shimai , Tsutomu Sahoda , Akihiko Sato , Kenji Maruyama
- 申请人地址: JP Kawasaki-shi
- 专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址: JP Kawasaki-shi
- 代理机构: Knobbe Martens Olson & Bear LLP
- 优先权: JPP2010-224978 20101004
- 主分类号: B05C5/02
- IPC分类号: B05C5/02 ; B05B13/02 ; B05C5/00 ; B05B13/00 ; H01L21/67
摘要:
Provided is a coating device including: a rotating part which rotatably holds a substrate while the substrate is upright; a cup portion disposed to surround an outer periphery of the substrate held by the rotating part and having an opening which exposes a first surface and a second surface of the substrate; a coating part which includes a nozzle ejecting a liquid material to the first surface and to the second surface of the substrate through the opening; and a cover portion which is provided on the first surface and the second surface sides of the substrate and by which the opening is opened and closed.
公开/授权文献
- US20120079983A1 COATING DEVICE 公开/授权日:2012-04-05