Invention Grant
- Patent Title: Method for making thermionic electron emission device
- Patent Title (中): 制造热离子电子发射装置的方法
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Application No.: US13301658Application Date: 2011-11-21
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Publication No.: US08808554B2Publication Date: 2014-08-19
- Inventor: Peng Liu , Liang Liu , Kai-Li Jiang , Shou-Shan Fan
- Applicant: Peng Liu , Liang Liu , Kai-Li Jiang , Shou-Shan Fan
- Applicant Address: CN Beijing TW New Taipei
- Assignee: Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- Current Assignee: Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- Current Assignee Address: CN Beijing TW New Taipei
- Agency: Novak, Druce Connolly Bove + Quigg LLP
- Priority: CN200710125672 20071229
- Main IPC: H01B13/00
- IPC: H01B13/00 ; B44C1/22

Abstract:
A method for making a thermionic electron emission device. The method includes the following steps. First, an insulating substrate is provided. Second, a number of lattices are formed on the insulating substrate. Third, a first electrode and a second electrode are fabricated in each lattice on the insulating substrate. Fourth, a carbon nanotube film structure is provided and at least part of the carbon nanotube film is suspended structure above the insulating substrate. Sixth, excess carbon nanotube film structure is cut away to obtain a number of thermionic electron emitters. The thermionic electron emitters are spaced from each other and located between the first electrode and the second electrode in each lattice.
Public/Granted literature
- US20120064794A1 METHOD FOR MAKING THERMIONIC ELECTRON EMISSION DEVICE Public/Granted day:2012-03-15
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