Medicinal inhalation devices and components having a non-metal coating and a fluorine-containing coating bonded to the non-metal coating wherein the fluorine-containing coating comprises an at least partially fluorinated compound comprising at least one functional group which shares at least one covalent bond with the non-metal coating are provided. In some embodiments, the partially fluorinated compound comprises a polyfluoropolyether silane of Formula Ia: Rf[Q-[C(R)2—Si(Y)3-x(R1a)x]y]z  Ia wherein: Rf is a monovalent or multivalent polyfluoropolyether segment; Q is an organic divalent or trivalent linking group; each R is independently hydrogen or a C1-4 alkyl group; each Y is independently a hydrolysable group; R1a is a C1-8 alkyl or phenyl group; x is 0 or 1 or 2; y is 1 or 2; and z is 1, 2, 3, or 4. Methods of making the devices and components are also provided.