Invention Grant
US08809163B2 Fabricating method of trench-gate metal oxide semiconductor device
有权
沟槽栅极金属氧化物半导体器件的制造方法
- Patent Title: Fabricating method of trench-gate metal oxide semiconductor device
- Patent Title (中): 沟槽栅极金属氧化物半导体器件的制造方法
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Application No.: US14095988Application Date: 2013-12-03
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Publication No.: US08809163B2Publication Date: 2014-08-19
- Inventor: Kuan-Ling Liu , Shih-Yuan Ueng
- Applicant: United Microelectronics Corporation
- Applicant Address: TW Hsinchu
- Assignee: United Microelectronics Corporation
- Current Assignee: United Microelectronics Corporation
- Current Assignee Address: TW Hsinchu
- Agent Ding Yu Tan
- Main IPC: H01L21/76
- IPC: H01L21/76 ; H01L21/20 ; H01L29/66 ; H01L29/78 ; H01L29/739

Abstract:
A fabricating method of a trench-gate metal oxide semiconductor device is provided. The fabricating method includes the steps of defining a first zone and a second zone in a substrate, forming at least one first trench in the second zone, forming a dielectric layer on the first zone and the second zone, filling the dielectric layer in the first trench, performing an etching process to form at least one second trench in the first zone by using the dielectric layer as an etching mask, forming a first gate dielectric layer on a sidewall of the second trench, and filling a conducting material layer into the second trench, thereby forming a first gate electrode.
Public/Granted literature
- US20140094013A1 FABRICATING METHOD OF TRENCH-GATE METAL OXIDE SEMICONDUCTOR DEVICE Public/Granted day:2014-04-03
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