发明授权
- 专利标题: Processing system
- 专利标题(中): 处理系统
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申请号: US13332467申请日: 2011-12-21
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公开(公告)号: US08811665B2公开(公告)日: 2014-08-19
- 发明人: Hans Opower , Klaus Juenger
- 申请人: Hans Opower , Klaus Juenger
- 申请人地址: DE Tettnang
- 专利权人: KLEO Halbleitertechnik GmbH
- 当前专利权人: KLEO Halbleitertechnik GmbH
- 当前专利权人地址: DE Tettnang
- 代理机构: Lipsitz & McAllister, LLC
- 优先权: DE102009032210 20090703
- 主分类号: G06K9/00
- IPC分类号: G06K9/00 ; G03F7/20 ; G03F9/00
摘要:
A processing system for plate-like objects is provided, with an exposure device and an object carrier with an object carrier surface for receiving the object. The exposure device and the carrier are movable relative to one another, such that the exact position of the object relative to the carrier is determinable. An edge detection device is provided which comprises at least one edge illumination unit having an illumination area, within which an object edge located in the respective object edge area has light directed onto it from the side of the carrier. At least one edge image detection unit is provided on a side of the object located opposite the carrier, the edge image detection unit imaging an edge section of the object edges located in the illumination area as an edge image, such that the respective edge image is detectable in its exact position relative to the carrier.
公开/授权文献
- US20120163660A1 PROCESSING SYSTEM 公开/授权日:2012-06-28
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