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US08815575B2 Stepping optical reduction system 有权
步进光学还原系统

Stepping optical reduction system
摘要:
A device and a method for synthesizing a microarray are provided. The device includes a reduction optics assembly and a target assembly. The reduction optics assembly is configured to receive a light array of selectable regions of light and dark areas, to reduce a size of the light array in two-dimensions, and to project a pattern of the light array on a target surface. The target assembly includes a first stage and a second stage. The first stage is configured to move the target surface in at least two directions in plane with the projected pattern with a first precision. The second stage is mounted to the first stage and is configured to move the target surface in the at least two directions in plane with the projected pattern with a second precision that is smaller than the first precision.
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