发明授权
- 专利标题: Stepping optical reduction system
- 专利标题(中): 步进光学还原系统
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申请号: US11859404申请日: 2007-09-21
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公开(公告)号: US08815575B2公开(公告)日: 2014-08-26
- 发明人: Franco Cerrina , Omar Negrete
- 申请人: Franco Cerrina , Omar Negrete
- 申请人地址: US WI Madison
- 专利权人: Wisconsin Alumni Research Foundation
- 当前专利权人: Wisconsin Alumni Research Foundation
- 当前专利权人地址: US WI Madison
- 代理机构: Bell & Manning, LLC
- 主分类号: G02F1/01
- IPC分类号: G02F1/01 ; G02F1/00
摘要:
A device and a method for synthesizing a microarray are provided. The device includes a reduction optics assembly and a target assembly. The reduction optics assembly is configured to receive a light array of selectable regions of light and dark areas, to reduce a size of the light array in two-dimensions, and to project a pattern of the light array on a target surface. The target assembly includes a first stage and a second stage. The first stage is configured to move the target surface in at least two directions in plane with the projected pattern with a first precision. The second stage is mounted to the first stage and is configured to move the target surface in the at least two directions in plane with the projected pattern with a second precision that is smaller than the first precision.
公开/授权文献
- US20090080053A1 STEPPING OPTICAL REDUCTION SYSTEM 公开/授权日:2009-03-26
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