Invention Grant
- Patent Title: Fabrication of reverse shallow trench isolation structures with super-steep retrograde wells
- Patent Title (中): 具有超陡逆行井的反向浅沟槽隔离结构的制造
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Application No.: US13670566Application Date: 2012-11-07
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Publication No.: US08815699B2Publication Date: 2014-08-26
- Inventor: Tong Weihua , Krishnan Bharat , Lun Zhao , Kim Seung , Lee Yongmeng , Kim Sun
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/76
- IPC: H01L21/76

Abstract:
Generally, the present disclosure is directed to methods for forming reverse shallow trench isolation structures with super-steep retrograde wells for use with field effect transistor elements. One illustrative method disclosed herein includes performing a thermal oxidation process to form a layer of thermal oxide material on a semiconductor layer of a semiconductor substrate, and forming a plurality of openings in the layer of thermal oxide material to form a plurality of isolation regions from the layer of thermal oxide material, wherein each of the plurality of openings exposes a respective surface region of the semiconductor layer.
Public/Granted literature
- US20140124794A1 FABRICATION OF REVERSE SHALLOW TRENCH ISOLATION STRUCTURES WITH SUPER-STEEP RETROGRADE WELLS Public/Granted day:2014-05-08
Information query
IPC分类: