Invention Grant
US08815699B2 Fabrication of reverse shallow trench isolation structures with super-steep retrograde wells 有权
具有超陡逆行井的反向浅沟槽隔离结构的制造

Fabrication of reverse shallow trench isolation structures with super-steep retrograde wells
Abstract:
Generally, the present disclosure is directed to methods for forming reverse shallow trench isolation structures with super-steep retrograde wells for use with field effect transistor elements. One illustrative method disclosed herein includes performing a thermal oxidation process to form a layer of thermal oxide material on a semiconductor layer of a semiconductor substrate, and forming a plurality of openings in the layer of thermal oxide material to form a plurality of isolation regions from the layer of thermal oxide material, wherein each of the plurality of openings exposes a respective surface region of the semiconductor layer.
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