- 专利标题: Method to improve nucleation of materials on graphene and carbon nanotubes
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申请号: US13482262申请日: 2012-05-29
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公开(公告)号: US08816333B2公开(公告)日: 2014-08-26
- 发明人: Katherina Babich , Alessandro Callegari , Zhihong Chen , Edward Kiewra , Yanning Sun
- 申请人: Katherina Babich , Alessandro Callegari , Zhihong Chen , Edward Kiewra , Yanning Sun
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Michael J. Chang, LLC
- 代理商 Vazken Alexanian
- 主分类号: H01L51/00
- IPC分类号: H01L51/00
摘要:
Techniques for forming a thin coating of a material on a carbon-based material are provided. In one aspect, a method for forming a thin coating on a surface of a carbon-based material is provided. The method includes the following steps. An ultra thin silicon nucleation layer is deposited to a thickness of from about two angstroms to about 10 angstroms on at least a portion of the surface of the carbon-based material to facilitate nucleation of the coating on the surface of the carbon-based material. The thin coating is deposited to a thickness of from about two angstroms to about 100 angstroms over the ultra thin silicon layer to form the thin coating on the surface of the carbon-based material.