Invention Grant
- Patent Title: Nanowire manufacturing method
- Patent Title (中): 纳米线制造方法
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Application No.: US14130146Application Date: 2012-06-28
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Publication No.: US08821740B2Publication Date: 2014-09-02
- Inventor: Young Jae Lee , Kyoung Jong Yoo , Jun Lee , Jin Su Kim , Jae Wan Park
- Applicant: Young Jae Lee , Kyoung Jong Yoo , Jun Lee , Jin Su Kim , Jae Wan Park
- Applicant Address: KR Seoul
- Assignee: LG Innotek Co., Ltd.
- Current Assignee: LG Innotek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Saliwanchik, Lloyd & Eisenschenk
- Priority: KR10-2011-0063528 20110629
- International Application: PCT/KR2012/005116 WO 20120628
- International Announcement: WO2013/002570 WO 20130103
- Main IPC: B44C1/22
- IPC: B44C1/22 ; C03C15/00 ; C03C25/68 ; C23F1/00

Abstract:
Provided is a nanowire manufacturing method, comprising forming a plurality of grid patterns on a substrate, forming a nanowire on the grid patterns, and separating the grid pattern and the nanowire. According to the present invention, the width and height of the nanowire can be adjusted by controlling the wet-etching process time period, and the nanowire can be manufactured at a room temperature at low cost, the nanowire can be mass-manufactured and the nanowire with regularity can be manufactured even in case of mass production.
Public/Granted literature
- US20140144881A1 NANOWIRE MANUFACTURING METHOD Public/Granted day:2014-05-29
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