Invention Grant
- Patent Title: Thin-film transistor and method of manufacturing the same
- Patent Title (中): 薄膜晶体管及其制造方法
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Application No.: US13167668Application Date: 2011-06-23
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Publication No.: US08823005B2Publication Date: 2014-09-02
- Inventor: O-Sung Seo , Seong-Hun Kim , Yang-Ho Bae , Jean-Ho Song
- Applicant: O-Sung Seo , Seong-Hun Kim , Yang-Ho Bae , Jean-Ho Song
- Applicant Address: KR Yongin
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2010-0076910 20100810
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/45 ; H01L29/786

Abstract:
A thin-film transistor (TFT) and a method of manufacturing the same are disclosed herein. The TFT may include a gate electrode disposed on an insulating substrate, an insulating layer disposed on the insulating substrate and the gate electrode, an active layer pattern disposed on the insulating layer to overlap the gate electrode, a source electrode disposed on the insulating layer and at least part of which overlaps the active layer pattern, and a drain electrode which is separated from the source electrode and at least part of which overlaps the active layer pattern. A first ohmic contact layer pattern may be disposed between the active layer pattern and the source electrode and between the active layer pattern and the drain electrode. The first ohmic contact layer may have higher nitrogen content on its surface than in other portions of the first ohmic contact layer.
Public/Granted literature
- US20120037913A1 THIN-FILM TRANSISTOR AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2012-02-16
Information query
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