Invention Grant
- Patent Title: Pressure sensor using MEMS resonator
- Patent Title (中): 使用MEMS谐振器的压力传感器
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Application No.: US14000673Application Date: 2013-02-12
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Publication No.: US08826742B2Publication Date: 2014-09-09
- Inventor: Kunihiko Nakamura
- Applicant: Panasonic Corporation
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2012-050332 20120307
- International Application: PCT/JP2013/000742 WO 20130212
- International Announcement: WO2013/132746 WO 20130912
- Main IPC: G01B7/16
- IPC: G01B7/16 ; G01L1/16 ; B81B3/00 ; G01L1/10

Abstract:
A pressure sensor including: a MEMS resonator; a sweeping unit which sweeps a frequency of an excitation signal in a predetermined direction of sweeping, over a predetermined frequency range including a resonance frequency f0 of a vibrator in the MEMS resonator, while outputting the excitation signal to the MEMS resonator; an integrating unit which inputs a vibrating-state information signal as a characteristic amount indicative of a vibrating state of the vibrator from the MEMS resonator while the sweeping unit sweeps the frequency, integrates a plurality of the vibrating-state information signals at different frequencies of the excitation signal, and outputs the integrated value; and a conversion unit adapted to determine a pressure acting on the MEMS resonator, based on the integrated value.
Public/Granted literature
- US20140202260A1 PRESSURE SENSOR USING MEMS RESONATOR Public/Granted day:2014-07-24
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