发明授权
- 专利标题: Switch probe and device and system for substrate inspection
- 专利标题(中): 开关探头和装置及系统进行基板检查
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申请号: US13118901申请日: 2011-05-31
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公开(公告)号: US08836362B2公开(公告)日: 2014-09-16
- 发明人: Tohru Hasegawa
- 申请人: Tohru Hasegawa
- 申请人地址: JP Tokyo
- 专利权人: Ricoh Company, Ltd.
- 当前专利权人: Ricoh Company, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Cooper & Dunham LLP
- 优先权: JP2010-123702 20100531
- 主分类号: G01R31/00
- IPC分类号: G01R31/00 ; G01R1/067
摘要:
A switch probe for use in a substrate inspection device to inspect a substrate includes a first tubular element, a first rod element partially accommodated in the first tubular element, and pressed into the first tubular element when the certain part is mounted for substrate inspection, a second tubular element fixed in the first tubular element, a second rod element partially accommodated in the second tubular element which is inside the first tubular element, and contacting with the first rod element when the first rod element is pressed into the first tubular element, and a fixing mechanism configured to temporarily fix the second rod element in a position so that the second rod element does not contact with the first rod element even when the first rod element is pressed into the first tubular element.
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