Invention Grant
- Patent Title: Surface acoustic wave sensor
- Patent Title (中): 表面声波传感器
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Application No.: US13557378Application Date: 2012-07-25
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Publication No.: US08841817B2Publication Date: 2014-09-23
- Inventor: Hideaki Yamada , Kazuhiko Kano
- Applicant: Hideaki Yamada , Kazuhiko Kano
- Applicant Address: JP Kariya
- Assignee: DENSO CORPORATION
- Current Assignee: DENSO CORPORATION
- Current Assignee Address: JP Kariya
- Agency: Posz Law Group, PLC
- Priority: JP2011-164507 20110727
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H01L41/113 ; H03H9/05 ; G01N29/24 ; G01N29/38 ; G01N29/42

Abstract:
In a SAW device, a first area placed at a surface of a measurement subject directly under a propagation portion is fixed to the measurement subject, and a second area placed at the surface of the measurement subject directly under both a drive electrode and a reflector is not fixed to the measurement subject. When a strain is generated in the measurement subject, a strain is generated only in the propagation portion, and a phase change is generated in a surface acoustic wave reflected by the reflector. Because the phase change is hardly affected by a temperature change, the strain of the measurement subject can be measured based on the phase change. Because a resonant frequency of the SAW device is changed by the temperature change, but is not affected by the strain of the measurement subject, a temperature can be measured based on a resonant frequency change.
Public/Granted literature
- US20130026882A1 SURFACE ACOUSTIC WAVE SENSOR Public/Granted day:2013-01-31
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