发明授权
- 专利标题: Microstructure and method of manufacturing the same
- 专利标题(中): 微结构及其制造方法
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申请号: US13047670申请日: 2011-03-14
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公开(公告)号: US08842353B2公开(公告)日: 2014-09-23
- 发明人: Takahisa Kato
- 申请人: Takahisa Kato
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon USA Inc IP Division
- 优先权: JP2010-058726 20100316
- 主分类号: G02B26/08
- IPC分类号: G02B26/08 ; B81B3/00
摘要:
A microstructure includes a substrate, a fixed supporting portion fixed to the substrate, a first movable portion, a second movable portion enhancing the rigidity of the first movable portion, and an elastic supporting portion elastically interconnecting the first movable portion and the fixed supporting portion. The second movable portion is secured to the first movable portion with a gap interposed therebetween and in such a manner as to cover the elastic supporting portion and the fixed supporting portion. The first movable portion and the second movable portion are elastically supported by the elastic supporting portion in such a manner as to be displaceable together relative to the fixed supporting portion.
公开/授权文献
- US20110228372A1 MICROSTRUCTURE AND METHOD OF MANUFACTURING THE SAME 公开/授权日:2011-09-22
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