发明授权
US08848168B2 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
有权
在浸没式光刻机中的晶片更换期间,将投影透镜下方的间隙中的浸没流体保持在装置和方法
- 专利标题: Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
- 专利标题(中): 在浸没式光刻机中的晶片更换期间,将投影透镜下方的间隙中的浸没流体保持在装置和方法
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申请号: US11812925申请日: 2007-06-22
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公开(公告)号: US08848168B2公开(公告)日: 2014-09-30
- 发明人: Michael Binnard
- 申请人: Michael Binnard
- 申请人地址: JP Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff PLC
- 主分类号: G03B27/58
- IPC分类号: G03B27/58 ; G03F7/20 ; G03B27/52
摘要:
An apparatus and method maintain immersion fluid in the gap adjacent to the projection lens during the exchange of a work piece in a lithography machine. The apparatus and method include an optical assembly that projects an image onto a work piece and a stage assembly including a work piece table that supports the work piece adjacent to the optical assembly. An environmental system is provided to supply and remove an immersion fluid from the gap between the optical assembly and the work piece on the stage assembly. After exposure of the work piece is complete, an exchange system removes the work piece and replaces it with a second work piece. An immersion fluid containment system maintains the immersion liquid in the gap during removal of the first work piece and replacement with the second work piece.
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