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US08850867B2 Photoacoustic sensor and method for the production and use thereof 有权
光声传感器及其制作及使用方法

Photoacoustic sensor and method for the production and use thereof
Abstract:
A photoacoustic sensor, containing a resonance body, which at least partially delimits a space for receiving molecules to be detected, and a device for detecting an oscillation of the resonance body, including a device for optically detecting the location of at least one partial surface of the resonance body. A method for the photoacoustic detection of molecules in the gas phase and to a method for producing an optically integrated photoacoustic sensor.
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