Invention Grant
- Patent Title: Inertial sensor
- Patent Title (中): 惯性传感器
-
Application No.: US13409039Application Date: 2012-02-29
-
Publication No.: US08850888B2Publication Date: 2014-10-07
- Inventor: Seung Mo Lim , Sung Wook Kim , Sung Jun Lee , Kyo Yeol Lee , Yun Sung Kang
- Applicant: Seung Mo Lim , Sung Wook Kim , Sung Jun Lee , Kyo Yeol Lee , Yun Sung Kang
- Applicant Address: KR Gyunggi-Do
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Gyunggi-Do
- Agency: Ladas & Parry, LLP
- Priority: KR10-2011-0146074 20111229
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01P15/09

Abstract:
Disclosed herein is an inertial sensor. The inertial sensor 100 according to preferred embodiments of the present invention includes: a membrane 110; a mass body 120 disposed under the membrane 110; a piezoelectric body 130 formed on the membrane 110 to drive the mass body 120; and trenches 140 formed by being collapsed in a thickness direction of the piezoelectric body 130 so as to vertically meet a direction in which the mass body 120 is driven. By this configuration, the trenches are formed by being collapsed in a thickness direction of the piezoelectric body 130 to provide directivity while retaining the rigidity of the piezoelectric body 130 to prevent a wave from being propagated in an unnecessary direction, thereby driving the inertial sensor 100 in a desired specific direction.
Public/Granted literature
- US20130167634A1 INERTIAL SENSOR Public/Granted day:2013-07-04
Information query