发明授权
- 专利标题: Acceleration sensor
- 专利标题(中): 加速度传感器
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申请号: US13058923申请日: 2009-11-19
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公开(公告)号: US08850889B2公开(公告)日: 2014-10-07
- 发明人: Hitoshi Yoshida , Yuji Suzuki , Nobuyuki Ibara , Hideki Ueda , Takeshi Okada
- 申请人: Hitoshi Yoshida , Yuji Suzuki , Nobuyuki Ibara , Hideki Ueda , Takeshi Okada
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: Greenblum & Bernstein, P.L.C.
- 优先权: JP2008-299989 20081125; JP2008-300004 20081125
- 国际申请: PCT/JP2009/069631 WO 20091119
- 国际公布: WO2010/061777 WO 20100603
- 主分类号: G01P15/125
- IPC分类号: G01P15/125 ; G01P15/08 ; G01P15/18
摘要:
An acceleration sensor includes: a rectangular moving electrode; a pair of beams which connect to centers of two opposite sides of the moving electrode, and support the moving electrode freely swingably; and first and second fixed electrodes which are provided on one side and other side of a boundary line, respectively, and are arranged to be opposed to a front surface of the moving electrode at a predetermined interval. A straight line that connects the pair of beams to each other is taken as the boundary line. Then, on a back surface of the moving electrode, first and second recessed portions are formed on one side of the boundary line and the other side thereof, respectively.
公开/授权文献
- US20110138914A1 ACCELERATION SENSOR 公开/授权日:2011-06-16
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