Invention Grant
US08851117B2 MEMS valve operating profile 有权
MEMS阀门操作简档

MEMS valve operating profile
Abstract:
A MEMS fluid control system is provided having a micro-electro-mechanical system. The system includes a plurality of ports, a cavity, a valve, an actuator, and a pair of electrical contacts. The plurality of ports are in communication with the cavity, the valve is disposed in the cavity, and the valve is connected to the actuator. The system further includes a hydraulic circuit having a pressure supply line in communication with a first of the plurality of ports, a control line in communication with a second of the plurality of ports, and an exhaust line in communication with a third of the plurality of ports. The valve includes an elongated portion and a blocking portion, the blocking portion includes a first, a second, and a third portions.
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