Invention Grant
- Patent Title: Substrate treatment system
- Patent Title (中): 基材处理系统
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Application No.: US13180944Application Date: 2011-07-12
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Publication No.: US08851274B2Publication Date: 2014-10-07
- Inventor: Henrik Obst
- Applicant: Henrik Obst
- Applicant Address: DE Dresden
- Assignee: Von Ardenne Anlagentechnik GmbH
- Current Assignee: Von Ardenne Anlagentechnik GmbH
- Current Assignee Address: DE Dresden
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Priority: DE102010031245 20100712
- Main IPC: B65G13/12
- IPC: B65G13/12 ; C23C14/56
Abstract:
A substrate treatment system for treating substrates includes a system chamber, delimited by chamber walls, at least one substrate treatment device and a transportation device inside the system chamber. The transportation device has an arrangement of transportation rollers arranged one behind the other in the transportation direction, for vertical or horizontal transportation of substrates. At least a first group of transportation rollers which are arranged immediately one behind the other, each has its own drive device.
Public/Granted literature
- US20120006656A1 SUBSTRATE TREATMENT SYSTEM Public/Granted day:2012-01-12
Information query
IPC分类:
