- 专利标题: Liquid application device, liquid application method, and nanoimprint system
-
申请号: US13730578申请日: 2012-12-28
-
公开(公告)号: US08851636B2公开(公告)日: 2014-10-07
- 发明人: Kenichi Kodama , Tadashi Omatsu , Satoshi Wakamatsu , Kunihiko Kodama
- 申请人: FUJIFILM Corporation
- 申请人地址: JP Tokyo
- 专利权人: FUJIFILM Corporation
- 当前专利权人: FUJIFILM Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Studebaker & Brackett PC
- 优先权: JP2010-150365 20100630
- 主分类号: B41J2/045
- IPC分类号: B41J2/045 ; G03F7/00 ; B41J2/14 ; B82Y40/00 ; B82Y10/00
摘要:
A liquid application device includes: a liquid discharge head having a structure in which nozzles for performing droplet ejection of a functional liquid onto a substrate are aligned in a row in a predetermined direction, and including liquid chambers connected to the nozzles respectively and piezoelectric elements which are provided correspondingly to the liquid chambers and serve to pressurize the liquid in the liquid chambers; a relative movement unit for causing relative movement between the substrate and the liquid discharge head; and a droplet ejection control unit for operating the piezoelectric elements so as to cause the liquid to land discretely on the substrate, and controlling operation of the piezoelectric elements according to each of groups formed by grouping the nozzles correspondingly to the structure of the liquid discharge head.
公开/授权文献
信息查询
IPC分类: