发明授权
- 专利标题: Substrate container storage system
- 专利标题(中): 基材容器储存系统
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申请号: US12780761申请日: 2010-05-14
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公开(公告)号: US08851820B2公开(公告)日: 2014-10-07
- 发明人: Anthony C. Bonora , Richard H. Gould , Michael Krolak
- 申请人: Anthony C. Bonora , Richard H. Gould , Michael Krolak
- 申请人地址: US MA Chelmsford
- 专利权人: Brooks Automation, Inc.
- 当前专利权人: Brooks Automation, Inc.
- 当前专利权人地址: US MA Chelmsford
- 代理机构: Martine Penilla Group, LLP
- 主分类号: B65G1/12
- IPC分类号: B65G1/12 ; H01L21/677
摘要:
A storage system and methods for operating a storage system are disclosed. The storage system includes a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves are coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions. The rail has at least some sections that are linear and some sections that are nonlinear and the sections are arranged in a loop.
公开/授权文献
- US20100290872A1 SUBSTRATE CONTAINER STORAGE SYSTEM 公开/授权日:2010-11-18
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