Invention Grant
US08851958B2 Method for the simultaneous double-side material-removing processing of at least three workpieces 有权
用于至少三个工件的同时双面材料去除处理的方法

  • Patent Title: Method for the simultaneous double-side material-removing processing of at least three workpieces
  • Patent Title (中): 用于至少三个工件的同时双面材料去除处理的方法
  • Application No.: US13602436
    Application Date: 2012-09-04
  • Publication No.: US08851958B2
    Publication Date: 2014-10-07
  • Inventor: Georg Pietsch
  • Applicant: Georg Pietsch
  • Applicant Address: DE Munich
  • Assignee: Siltronic AG
  • Current Assignee: Siltronic AG
  • Current Assignee Address: DE Munich
  • Agency: Leydig, Voit & Mayer, Ltd.
  • Priority: DE102011082857 20110916
  • Main IPC: B24B37/28
  • IPC: B24B37/28 B24B47/12
Method for the simultaneous double-side material-removing processing of at least three workpieces
Abstract:
A method for simultaneous double-side material-removing processing of at least three workpieces includes disposing the workpieces in a working gap between rotating upper and lower working disks of a double-side processing apparatus. The workpieces lie in freely movable fashion in respective openings in a guide cage and are moved under pressure in the working gap using the guide cage. Upon attaining a preselected target thickness of the workpieces, a deceleration process is initiated that includes reducing an angular velocity ωi(t) of a respective drive i of each of the upper working disk, lower working disk and guide cage to a standstill. The reducing is carried out such that ratios of the angular velocities ωi(t) with respect to one another as a function of time t deviate by no more than 10% from initial ratios of the angular velocities ωi(t) corresponding to when the preselected target thickness was attained.
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