Invention Grant
- Patent Title: Method for the simultaneous double-side material-removing processing of at least three workpieces
- Patent Title (中): 用于至少三个工件的同时双面材料去除处理的方法
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Application No.: US13602436Application Date: 2012-09-04
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Publication No.: US08851958B2Publication Date: 2014-10-07
- Inventor: Georg Pietsch
- Applicant: Georg Pietsch
- Applicant Address: DE Munich
- Assignee: Siltronic AG
- Current Assignee: Siltronic AG
- Current Assignee Address: DE Munich
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: DE102011082857 20110916
- Main IPC: B24B37/28
- IPC: B24B37/28 ; B24B47/12

Abstract:
A method for simultaneous double-side material-removing processing of at least three workpieces includes disposing the workpieces in a working gap between rotating upper and lower working disks of a double-side processing apparatus. The workpieces lie in freely movable fashion in respective openings in a guide cage and are moved under pressure in the working gap using the guide cage. Upon attaining a preselected target thickness of the workpieces, a deceleration process is initiated that includes reducing an angular velocity ωi(t) of a respective drive i of each of the upper working disk, lower working disk and guide cage to a standstill. The reducing is carried out such that ratios of the angular velocities ωi(t) with respect to one another as a function of time t deviate by no more than 10% from initial ratios of the angular velocities ωi(t) corresponding to when the preselected target thickness was attained.
Public/Granted literature
- US20130072093A1 METHOD FOR THE SIMULTANEOUS DOUBLE-SIDE MATERIAL-REMOVING PROCESSING OF AT LEAST THREE WORKPIECES Public/Granted day:2013-03-21
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