Invention Grant
- Patent Title: Method for manufacturing single crystal
- Patent Title (中): 单晶制造方法
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Application No.: US14046493Application Date: 2013-10-04
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Publication No.: US08852340B2Publication Date: 2014-10-07
- Inventor: Yasuhito Narushima , Fukuo Ogawa , Shinichi Kawazoe , Toshimichi Kubota
- Applicant: Sumco Techxiv Corporation
- Applicant Address: unknown Omura-shi
- Assignee: Sumco Techxiv Corporation
- Current Assignee: Sumco Techxiv Corporation
- Current Assignee Address: unknown Omura-shi
- Agency: Holtz Holtz Goodman & Chick PC
- Priority: JP2007-125847 20070510
- Main IPC: C30B11/00
- IPC: C30B11/00 ; C30B15/00 ; C30B21/06 ; C30B27/02 ; C30B28/10 ; C30B30/04 ; C30B9/00 ; C30B17/00 ; C30B21/02 ; C30B28/06 ; C30B15/20 ; C30B15/04 ; C30B29/06

Abstract:
In consideration of influence of segregation, an evaporation area of a volatile dopant and influence of pulling-up speed at the time of manufacturing a monocrystal using a monocrystal pulling-up device, an evaporation speed formula for calculating evaporation speed of the dopant is derived. At predetermined timing during pulling-up, gas flow volume and inner pressure in a chamber are controlled such that a cumulative evaporation amount of the dopant, calculated based on the evaporation speed formula, becomes a predetermined amount. A difference between a resistivity profile of the monocrystal predicted based on the evaporation speed formula and an actual resistivity profile is made small. Since no volatile dopant is subsequently added, increase in workload on an operator, increase of manufacturing time, an increase in amorphous adhering to the inside of the chamber, and an increase in workload at the time of cleaning the inside of the chamber can be prevented.
Public/Granted literature
- US20140033967A1 METHOD FOR MANUFACTURING SINGLE CRYSTAL Public/Granted day:2014-02-06
Information query
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