Invention Grant
US08852346B2 Mask frame assembly for thin layer deposition and organic light emitting display device
有权
用于薄层沉积的面罩框架组件和有机发光显示装置
- Patent Title: Mask frame assembly for thin layer deposition and organic light emitting display device
- Patent Title (中): 用于薄层沉积的面罩框架组件和有机发光显示装置
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Application No.: US12973597Application Date: 2010-12-20
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Publication No.: US08852346B2Publication Date: 2014-10-07
- Inventor: Sang-Shin Lee
- Applicant: Sang-Shin Lee
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: KR10-2009-0125023 20091225
- Main IPC: C23C16/50
- IPC: C23C16/50 ; C23C16/00 ; C23F1/00 ; H01L21/306 ; C23C14/04 ; H01L51/00 ; H01L27/32 ; H01L51/56

Abstract:
A mask frame assembly for thin film deposition is disclosed. In one embodiment, the assembly includes: a frame, and a plurality of unit mask strips attached to the frame, wherein each of the unit mask strips includes a plurality of unit masking patterns which are spaced apart from each other. In one embodiment, each of the unit masking patterns includes: i) a plurality of stripe pattern slits and ii) a plurality of sets of dot pattern slits each set formed to be substantially parallel with the stripe pattern slits. Further, the stripe pattern slits and the sets of dot pattern slits are alternately formed with respect to each other, wherein each set of the dot pattern slits includes a plurality of dot pattern slits, and wherein the length of each stripe pattern slit is substantially the same as the length of each set of the dot pattern slits.
Public/Granted literature
- US20110157575A1 MASK FRAME ASSEMBLY FOR THIN LAYER DEPOSITION AND ORGANIC LIGHT EMITTING DISPLAY DEVICE Public/Granted day:2011-06-30
Information query
IPC分类: