Invention Grant
- Patent Title: Tailorable titanium-tungsten alloy material thermally matched to semiconductor substrates and devices
- Patent Title (中): 可靠的钛 - 钨合金材料与半导体衬底和器件热匹配
-
Application No.: US12458073Application Date: 2009-06-30
-
Publication No.: US08852378B2Publication Date: 2014-10-07
- Inventor: Michael A. Huff , Paul Sunal
- Applicant: Michael A. Huff , Paul Sunal
- Applicant Address: US VA Reston
- Assignee: Corporation for National Research Initiatives
- Current Assignee: Corporation for National Research Initiatives
- Current Assignee Address: US VA Reston
- Agency: Nixon & Vanderhye, PC
- Main IPC: C22C1/00
- IPC: C22C1/00 ; H01L23/373 ; C22C1/04 ; H01L23/473 ; H01S5/024 ; H01S5/40

Abstract:
The present invention relates generally to a metallic alloy composed of Titanium and Tungsten that together form an alloy having a Coefficient of Thermal Expansion (CTE), wherein the content of the respective constituents can be adjusted so that the alloy material can be nearly perfectly matched to that of a commonly used semiconductor and ceramic materials. Moreover, alloys of Titanium-Tungsten have excellent electrical and thermal conductivities making them ideal material choices for many electrical, photonic, thermoelectric, MMIC, NEMS, nanotechnology, power electronics, MEMS, and packaging applications. The present invention describes a method for designing the TiW alloy so as to nearly perfectly match the coefficient of thermal expansion of a large number of different types of commonly used semiconductor and ceramic materials. The present invention also describes a number of useful configurations wherein the TiW material is made as well as how it can be shaped, formed and polished into heat sink, heat spreaders, and electrodes for many applications. The present invention also discloses the direct bonding of a TiW substrate to a semiconductor substrate.
Public/Granted literature
- US20100108254A1 Tailorable titanium-tungsten alloy material thermally matched to semiconductor substrates and devices Public/Granted day:2010-05-06
Information query