Invention Grant
- Patent Title: Method for synthesis of cubic boron nitride
- Patent Title (中): 立方氮化硼合成方法
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Application No.: US13744557Application Date: 2013-01-18
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Publication No.: US08852406B2Publication Date: 2014-10-07
- Inventor: Young Joon Baik , Jong Keuk Park , Wook Seong Lee
- Applicant: Korea Institute of Science and Technology
- Applicant Address: KR Seoul
- Assignee: Korea Institute of Science and Technology
- Current Assignee: Korea Institute of Science and Technology
- Current Assignee Address: KR Seoul
- Agency: Ladas & Parry LLP
- Priority: KR10-2012-0046828 20120503
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/46 ; C23C16/34 ; C23C14/06

Abstract:
A method for producing a cubic boron nitride (cBN) thin film includes depositing cBN onto nanocrystalline diamond having controlled surface irregularity characteristics to improve the adhesion at the interface of cBN/nanocrystalline diamond, while incorporating hydrogen to a reaction gas upon the synthesis of cBN and controlling the feed time of hydrogen, so that harmful reactions occurring on a surface of nanocrystalline diamond and residual stress applied to cBN may be inhibited. Also, a cBN thin film structure is obtained by the method. The cBN thin film is formed on the nanocrystalline diamond thin film by using a physical vapor deposition process, wherein a reaction gas supplied when the deposition of a thin film occurs is a mixed gas of argon (Ar) with nitrogen (N2), and hydrogen (H2) is added to the reaction gas at a time after the deposition of a thin film occurs.
Public/Granted literature
- US20130295387A1 METHOD FOR SYNTHESIS OF CUBIC BORON NITRIDE AND CUBIC BORON NITRIDE STRUCTURE Public/Granted day:2013-11-07
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