Invention Grant
- Patent Title: Alkali earth metal precursors for depositing calcium and strontium containing films
- Patent Title (中): 用于沉积钙和含锶膜的碱土金属前体
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Application No.: US12406682Application Date: 2009-03-18
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Publication No.: US08852460B2Publication Date: 2014-10-07
- Inventor: Olivier Letessier , Christian Dussarrat , Benjamin J. Feist , Vincent M. Omarjee
- Applicant: Olivier Letessier , Christian Dussarrat , Benjamin J. Feist , Vincent M. Omarjee
- Applicant Address: US TX Dallas US CA Fremont
- Assignee: Air Liquide Electronics U.S. LP,American Air Liquide, Inc.
- Current Assignee: Air Liquide Electronics U.S. LP,American Air Liquide, Inc.
- Current Assignee Address: US TX Dallas US CA Fremont
- Agent Patricia E. McQueeney
- Main IPC: H01B1/00
- IPC: H01B1/00 ; H01B1/12 ; B05D5/12 ; C23C16/00 ; C23C16/40 ; B05D3/12 ; B05D3/00 ; H05H1/24 ; H01T14/00 ; H05B6/02 ; H05B6/24 ; C07F5/00 ; C08B5/04 ; H01L39/24 ; C04B35/45 ; C21B13/00 ; C21B11/10 ; C23C16/455
Abstract:
Methods and compositions for the deposition of a film on a substrate. In general, the disclosed compositions and methods utilize a precursor containing calcium or strontium.
Public/Granted literature
- US20090236568A1 ALKALI EARTH METAL PRECURSORS FOR DEPOSITING CALCIUM AND STRONTIUM CONTAINING FILMS Public/Granted day:2009-09-24
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