Invention Grant
- Patent Title: Organic layer deposition apparatus
- Patent Title (中): 有机层沉积装置
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Application No.: US13198591Application Date: 2011-08-04
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Publication No.: US08852687B2Publication Date: 2014-10-07
- Inventor: Uno Chang , Jae-Kwang Ryu , Eun-Sun Choi , Byung-Su Kim
- Applicant: Uno Chang , Jae-Kwang Ryu , Eun-Sun Choi , Byung-Su Kim
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Christie, Parker & Hale, LLP
- Priority: KR10-2010-0127090 20101213
- Main IPC: B05D3/00
- IPC: B05D3/00 ; C23C16/52 ; C23C16/44 ; C23C14/24 ; C23C14/12 ; C23C14/04 ; C23C14/56 ; H01L51/56
Abstract:
An organic layer deposition apparatus for forming an organic layer while a substrate is being moved, in which an interval between the substrate and the organic layer deposition apparatus can be measured at a vacuum condition.
Public/Granted literature
- US20120145077A1 ORGANIC LAYER DEPOSITION APPARATUS Public/Granted day:2012-06-14
Information query
