Invention Grant
US08852726B2 Photosensitive polymer composition, method of producing pattern and electronic parts
有权
光敏聚合物组合物,图案和电子部件的制造方法
- Patent Title: Photosensitive polymer composition, method of producing pattern and electronic parts
- Patent Title (中): 光敏聚合物组合物,图案和电子部件的制造方法
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Application No.: US13528989Application Date: 2012-06-21
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Publication No.: US08852726B2Publication Date: 2014-10-07
- Inventor: Masayuki Ooe , Hiroshi Komatsu , Yoshiko Tsumaru , Dai Kawasaki , Kouji Katou , Takumi Ueno
- Applicant: Masayuki Ooe , Hiroshi Komatsu , Yoshiko Tsumaru , Dai Kawasaki , Kouji Katou , Takumi Ueno
- Applicant Address: JP Tokyo
- Assignee: Hitachi Chemical Dupont Microsystems Ltd.
- Current Assignee: Hitachi Chemical Dupont Microsystems Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2004-006715 20040114
- Main IPC: B32B3/00
- IPC: B32B3/00 ; G03F7/00 ; C08K5/13 ; C08K5/138 ; G03F7/039 ; G03F7/40 ; C08L77/10 ; G03F7/022 ; G03F7/023 ; G03F7/004 ; C08K5/03 ; C08L77/06

Abstract:
A photosensitive polymer composition includes (a) a polyamide having a repeating unit represented by the following general formula (I): wherein U represents a tetravalent organic group, V represents a bivalent organic group and p is an integer representing a number of the repeating unit; (b) a compound which generates an acid upon receiving light; and (c) a compound represented by the following general formula (II): wherein m and n are each independently integer of 1 or 2, Rs are each independently hydrogen, alkyl group or acyl group, and R1 and R2 each independently represents fluoroalkyl group having 1 to 3 carbon atoms.
Public/Granted literature
- US20120263920A1 Photosensitive Polymer Composition, Method of Producing Pattern and Electronic Parts Public/Granted day:2012-10-18
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