Invention Grant
- Patent Title: Method of manufacturing image pickup device
- Patent Title (中): 图像拾取装置的制造方法
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Application No.: US13958840Application Date: 2013-08-05
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Publication No.: US08852987B2Publication Date: 2014-10-07
- Inventor: Yusuke Tsukagoshi , Tadashi Sawayama , Akihiro Kawano , Sho Suzuki , Takehito Okabe , Masatsugu Itahashi
- Applicant: Canon Kabushiki Kaisha
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc IP Division
- Priority: JP2012-174844 20120807
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/0232 ; H01L27/146

Abstract:
A method of manufacturing an image pickup device includes a step of forming a filling member such that the filling member covers a light guiding part and a peripheral part provided in a film. The light guiding part is positioned on an image pickup region of the image pickup device and has openings that correspond to respective photoelectric conversion portions. The peripheral part is positioned on a peripheral region of the image pickup device. The filling member fills in the openings. The method includes a step of processing the filling member. The method includes a step of forming light guiding members, which is performed after the step of processing filling member has been performed, by a polishing process performed on the filling member so that the light guiding part is exposed. The light guiding members are part of the filling member and disposed in the openings.
Public/Granted literature
- US20140045292A1 METHOD OF MANUFACTURING IMAGE PICKUP DEVICE Public/Granted day:2014-02-13
Information query
IPC分类: