Invention Grant
- Patent Title: Preparation method for patternization of metal electrodes in silicon solar cells
- Patent Title (中): 硅太阳能电池中金属电极图案化的制备方法
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Application No.: US13959835Application Date: 2013-08-06
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Publication No.: US08852995B1Publication Date: 2014-10-07
- Inventor: Yu-Han Su , Tsun-Neng Yang , Wei-Yang Ma , Chien-Chang Chao , Shan-Ming Lan
- Applicant: Atomic Energy Council—Institute of Nuclear Energy Research
- Applicant Address: TW Taoyuan County
- Assignee: Atomic Energy Council-Institute of Nuclear Energy Research
- Current Assignee: Atomic Energy Council-Institute of Nuclear Energy Research
- Current Assignee Address: TW Taoyuan County
- Agency: Rosenberg, Klein & Lee
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/028 ; H01L31/068 ; H01L31/0224

Abstract:
The present invention relates to a preparation method for patternization of metal electrodes in silicon solar cells. After disposing an amorphous silicon layer on a silicon substrate processed by diffusion, laser light is projected on the amorphous silicon layer for patternization, and transforming the amorphous silicon with low optical conductivity into polysilicon with high optical conductivity thanks to the recrystallization process of the laser light. Then, after immersing the amorphous silicon layer in plating liquid, metal electrode can be formed accurately at the spots of the amorphous silicon layer patterned by laser light. No external voltage is required; plating reaction is induced by illumination directly.
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