Invention Grant
US08853019B1 Methods of forming a semiconductor device with a nanowire channel structure by performing an anneal process
有权
通过进行退火处理形成具有纳米线通道结构的半导体器件的方法
- Patent Title: Methods of forming a semiconductor device with a nanowire channel structure by performing an anneal process
- Patent Title (中): 通过进行退火处理形成具有纳米线通道结构的半导体器件的方法
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Application No.: US13798616Application Date: 2013-03-13
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Publication No.: US08853019B1Publication Date: 2014-10-07
- Inventor: Jody A. Fronheiser , Jeremy A. Wahl , Kerem Akarvardar , Ajey P. Jacob , Daniel T. Pham
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/94
- IPC: H01L29/94 ; H01L29/66 ; B82Y40/00

Abstract:
One method disclosed herein includes forming a layer of silicon/germanium having a germanium concentration of at least 30% on a semiconducting substrate, forming a plurality of spaced-apart trenches that extend through the layer of silicon/germanium and at least partially into the semiconducting substrate, wherein the trenches define a fin structure for the device comprised of a portion of the substrate and a portion of the layer of silicon/germanium, the portion of the layer of silicon/germanium having a first cross-sectional configuration, forming a layer of insulating material in the trenches and above the fin structure, performing an anneal process on the device so as to cause the first cross-sectional configuration of the layer of silicon/germanium to change to a second cross-sectional configuration that is different from the first cross-sectional configuration, and forming a final gate structure around at least a portion of the layer of silicon/germanium having the second cross-sectional configuration.
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