Invention Grant
US08853040B2 Strained thin body CMOS device having vertically raised source/drain stressors with single spacer
有权
应变的薄体CMOS器件具有单个间隔物的垂直升高的源/漏应力源
- Patent Title: Strained thin body CMOS device having vertically raised source/drain stressors with single spacer
- Patent Title (中): 应变的薄体CMOS器件具有单个间隔物的垂直升高的源/漏应力源
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Application No.: US13965466Application Date: 2013-08-13
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Publication No.: US08853040B2Publication Date: 2014-10-07
- Inventor: Kangguo Cheng , Bruce B. Doris , Pranita Kerber , Ali Khakifirooz , Ghavam G. Shahidi
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/66 ; H01L29/78 ; H01L27/12 ; H01L21/84 ; H01L29/786 ; H01L21/8238

Abstract:
A method of forming a transistor device includes forming a patterned gate structure over a semiconductor substrate; forming a spacer layer over the semiconductor substrate and patterned gate structure; removing horizontally disposed portions of the spacer layer so as to form a vertical sidewall spacer adjacent the patterned gate structure; and forming a raised source/drain (RSD) structure over the semiconductor substrate and adjacent the vertical sidewall spacer, wherein the RSD structure has a substantially vertical sidewall profile so as to abut the vertical sidewall spacer and produce one of a compressive and a tensile strain on a channel region of the semiconductor substrate below the patterned gate structure.
Public/Granted literature
- US20130330887A1 STRAINED THIN BODY CMOS DEVICE HAVING VERTICALLY RAISED SOURCE/DRAIN STRESSORS WITH SINGLE SPACER Public/Granted day:2013-12-12
Information query
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