Invention Grant
- Patent Title: Self aligned fin-type programmable memory cell
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Application No.: US14281192Application Date: 2014-05-19
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Publication No.: US08853047B2Publication Date: 2014-10-07
- Inventor: Hsiang-Lan Lung , Matthew J. Breitwisch , Chung Hon Lam
- Applicant: Macronix International Co., Ltd.
- Applicant Address: TW Hsinchu US NY Armonk
- Assignee: Macronix International Co., Ltd.,International Business Machines Corporation
- Current Assignee: Macronix International Co., Ltd.,International Business Machines Corporation
- Current Assignee Address: TW Hsinchu US NY Armonk
- Agency: Haynes Beffel & Wolfeld LLP
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L21/20 ; H01L27/24

Abstract:
A fin-type programmable memory cell includes a bottom electrode electrically coupled to an access device, a top electrode, and an L-shaped memory material element electrically coupled to the bottom and top electrodes. A memory array includes an array of such memory cells, electrically coupled to an array of access devices. Method for making a memory cell, includes: forming a dielectric support layer over a bottom electrode, the dielectric support layer having an upper surface; forming a cavity through the dielectric support layer, exposing a surface of the bottom electrode and defining a dielectric support structure having a sidewall; forming a film of memory material over the dielectric support structure and in the cavity; depositing a dielectric spacer layer over the memory material film; forming a dielectric sidewall spacer from the dielectric spacer layer and a memory material structure having a generally horizontal portion underlying the dielectric sidewall spacer and a generally vertical portion between the dielectric sidewall spacer and the sidewall of the dielectric support structure; forming a dielectric fill; planarizing the dielectric fill to expose upper ends of the vertical portion of the memory material structure; depositing a top electrode material over the planarized dielectric fill; and forming a top electrode from the top electrode material and a memory material element from the memory material structure.
Public/Granted literature
- US20140256110A1 SELF ALIGNED FIN-TYPE PROGRAMMABLE MEMORY CELL Public/Granted day:2014-09-11
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