Invention Grant
US08853051B2 Methods of recessing an active region and STI structures in a common etch process
有权
在普通蚀刻工艺中凹陷有源区和STI结构的方法
- Patent Title: Methods of recessing an active region and STI structures in a common etch process
- Patent Title (中): 在普通蚀刻工艺中凹陷有源区和STI结构的方法
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Application No.: US13445596Application Date: 2012-04-12
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Publication No.: US08853051B2Publication Date: 2014-10-07
- Inventor: Frank Jakubowski , Jorg Radecker , Frank Ludwig
- Applicant: Frank Jakubowski , Jorg Radecker , Frank Ludwig
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/76
- IPC: H01L21/76

Abstract:
Generally, the present disclosure is directed to various methods of recessing an active region and an adjacent isolation structure in a common etch process. One illustrative method disclosed includes forming an isolation structure in a semiconducting substrate, wherein the isolation structure defines an active area in the substrate, forming a patterned masking layer above the substrate, wherein the patterned masking layer exposes the active area and at least a portion of the isolation structure for further processing, and performing a non-selective dry etching process on the exposed active area and the exposed portion of the isolation structure to define a recess in the substrate and to remove at least some of the exposed portions of the isolation structure.
Public/Granted literature
- US20130273709A1 METHODS OF RECESSING AN ACTIVE REGION AND STI STRUCTURES IN A COMMON ETCH PROCESS Public/Granted day:2013-10-17
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