发明授权
- 专利标题: Method of making surface mount stacked semiconductor devices
- 专利标题(中): 制造表面贴装半导体器件的方法
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申请号: US13530117申请日: 2012-06-22
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公开(公告)号: US08853058B2公开(公告)日: 2014-10-07
- 发明人: Kesvakumar V. C. Muniandy , Navas Khan Oratti Kalandar , Lan Chu Tan
- 申请人: Kesvakumar V. C. Muniandy , Navas Khan Oratti Kalandar , Lan Chu Tan
- 申请人地址: US TX Austin
- 专利权人: Freescale Semiconductor, Inc.
- 当前专利权人: Freescale Semiconductor, Inc.
- 当前专利权人地址: US TX Austin
- 代理商 Charles Bergere
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A method of assembling semiconductor devices includes providing a structure that includes an array of conductive frame members beside an array of apertures and an array of conductive vias that are exposed at a first face and extend towards a second face. An array of semiconductor dies is positioned in the array of apertures with their active faces positioned in the first face of the structure. The assembly is encapsulated from the second face of the structure and a redistribution layer is formed on the first face of the structure and the active faces of the die. Material is removed from the back face of the encapsulated array to expose the vias at the back face for connection through a further redistribution layer formed on the back face to electronic components stacked vertically on the further redistribution layer.
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