Invention Grant
- Patent Title: Laser crystallization apparatus and laser crystallization method using the apparatus
- Patent Title (中): 激光结晶装置和激光结晶法使用该装置
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Application No.: US13411276Application Date: 2012-03-02
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Publication No.: US08853062B2Publication Date: 2014-10-07
- Inventor: Hiroshi Okumura
- Applicant: Hiroshi Okumura
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Innovation Counsel LLP
- Priority: KR10-2011-0106535 20111018
- Main IPC: H01S3/10
- IPC: H01S3/10 ; B23K26/00 ; H01L31/18

Abstract:
A laser crystallization device includes a first light source providing a first light and a second light source providing a second light. The device further includes a first lens set receiving the first light to generate a first transmitted light, the first transmitted light having a first profile, the first profile having a first profile error portion and a first non-error portion. The device further includes a second lens set receiving the second light to generate a second transmitted light, the second transmitted light having a second profile, the second profile having a second profile error portion and a second non-error portion, the second profile error portion corresponding to the first non-error portion, the second non-error portion corresponding to the first profile error portion. The device further includes an optical system combining the first transmitted light with the second transmitted light.
Public/Granted literature
- US20130092668A1 LASER CRYSTALLIZATION APPARATUS AND LASER CRYSTALLIZATION METHOD USING THE APPARATUS Public/Granted day:2013-04-18
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