Invention Grant
- Patent Title: Self-aligned contacts
- Patent Title (中): 自对准接触
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Application No.: US13607856Application Date: 2012-09-10
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Publication No.: US08853076B2Publication Date: 2014-10-07
- Inventor: Su Chen Fan , David V. Horak , Shom Ponoth , David L. Rath , Muthumanickam Sankarapandian
- Applicant: Su Chen Fan , David V. Horak , Shom Ponoth , David L. Rath , Muthumanickam Sankarapandian
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Yuanmin Cai
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
Self-aligned contacts in a metal gate structure and methods of manufacture are disclosed herein. The method includes forming a metal gate structure having a sidewall structure. The method further includes recessing the metal gate structure and forming a masking material within the recess. The method further includes forming a borderless contact adjacent to the metal gate structure, overlapping the masking material and the sidewall structure.
Public/Granted literature
- US20140070282A1 SELF-ALIGNED CONTACTS Public/Granted day:2014-03-13
Information query
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