Invention Grant
- Patent Title: Polishing liquid for CMP and polishing method using the same
- Patent Title (中): CMP抛光液及使用其的抛光方法
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Application No.: US13519809Application Date: 2010-12-24
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Publication No.: US08853082B2Publication Date: 2014-10-07
- Inventor: Masayuki Hanano , Eiichi Satou , Munehiro Oota , Kanshi Chinone
- Applicant: Masayuki Hanano , Eiichi Satou , Munehiro Oota , Kanshi Chinone
- Applicant Address: JP Tokyo
- Assignee: Hitachi Chemical Company, Ltd.
- Current Assignee: Hitachi Chemical Company, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Griffin & Szipl, P.C.
- Priority: JPP2009-297737 20091228
- International Application: PCT/JP2010/073452 WO 20101224
- International Announcement: WO2011/081109 WO 20110707
- Main IPC: H01L21/302
- IPC: H01L21/302

Abstract:
An object of the present invention is to provide a polishing liquid for CMP with which polishing scratches can be reduced and a sufficiently high polishing rate can be obtained in a CMP step for an ILD film, aggregation of an abrasive grain is difficult to occur, and high flatness is obtained, and provide a polishing method using the same. The polishing liquid for CMP according to the present invention is a polishing liquid for CMP containing an abrasive grain, an additive, and water, wherein the abrasive grain comprises a cerium-based particle, and the additive comprises a 4-pyrone-based compound and at least one of a nonionic surfactant or a cationic surfactant: [wherein X11, X12, and X13 each independently represent a hydrogen atom or a monovalent substituent].
Public/Granted literature
- US20120315763A1 POLISHING LIQUID FOR CMP AND POLISHING METHOD USING THE SAME Public/Granted day:2012-12-13
Information query
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