Invention Grant
US08853085B1 Grapho-epitaxy DSA process with dimension control of template pattern
有权
Grapho外延DSA过程与模板图案的尺寸控制
- Patent Title: Grapho-epitaxy DSA process with dimension control of template pattern
- Patent Title (中): Grapho外延DSA过程与模板图案的尺寸控制
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Application No.: US13868564Application Date: 2013-04-23
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Publication No.: US08853085B1Publication Date: 2014-10-07
- Inventor: Jassem A. Abdallah , Matthew E. Colburn , Steven J. Holmes , Chi-Chun Liu
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Parashos Kalaitzis
- Main IPC: H01L21/311
- IPC: H01L21/311 ; H01L21/308

Abstract:
A method for defining a template for directed self-assembly (DSA) materials includes patterning a resist on a stack including an ARC and a mask formed over a hydrophilic layer. A pattern is formed by etching the ARC and the mask to form template lines which are trimmed to less than a minimum feature size (L). Hydrophobic spacers are formed on the template lines and include a fractional width of L. A neutral brush layer is grafted to the hydrophilic layer. A DSA material is deposited between the spacers and annealed to form material domains in a form of alternating lines of a first and a second material wherein the first material in contact with the spacers includes a width less than a width of the lines. A metal is added to the domains forming an etch resistant second material. The first material and the spacers are removed to form a DSA template pattern.
Public/Granted literature
- US20140315390A1 GRAPHO-EPITAXY DSA PROCESS WITH DIMENSION CONTROL OF TEMPLATE PATTERN Public/Granted day:2014-10-23
Information query
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