Invention Grant
- Patent Title: Sulfonium compound, photoacid generator, and resist composition
- Patent Title (中): 锍化合物,光酸产生剂和抗蚀剂组合物
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Application No.: US13557893Application Date: 2012-07-25
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Publication No.: US08853441B2Publication Date: 2014-10-07
- Inventor: Jung Hoon Oh , Dae Kyung Yoon , Seung Duk Cho , So Jeong Park
- Applicant: Jung Hoon Oh , Dae Kyung Yoon , Seung Duk Cho , So Jeong Park
- Applicant Address: KR Seoul
- Assignee: Korea Kumho Petrochemical Co., Ltd.
- Current Assignee: Korea Kumho Petrochemical Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Davidson, Davidson & Kappel, LLC
- Priority: KR10-2011-0077527 20110803
- Main IPC: C07C69/013
- IPC: C07C69/013 ; C07C69/017 ; C07C309/02 ; C07C309/39 ; C07C309/44 ; C07C381/12 ; G03F7/00 ; C07C309/12 ; G03F7/004 ; C07D333/46 ; C07C309/06 ; C07D307/64 ; G03C1/00 ; G03F7/039

Abstract:
A sulfonium compound represented by the following formula (1), a photoacid generator containing the sulfonium compound, and a resist composition containing the photoacid generator are provided: wherein X represents an electron donor group; R1 and R2 each independently represent an alkyl group or the like; R4 to R6 each independently represent an alkyl group, or the like; R3 represents a cyclic alkenediyl group or the like; and −A represents an anion. The sulfonium compound has a photon yield that is controllable by introducing different absorbers to the cation region in one molecule, can address the inconvenience of using a mixture of different photoacid generators when the sulfonium compound is applied as a photoacid generator, has excellent miscibility in a resist, and has enhanced resolution and line edge roughness.
Public/Granted literature
- US20130035503A1 SULFONIUM COMPOUND, PHOTOACID GENERATOR, AND RESIST COMPOSITION Public/Granted day:2013-02-07
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