Invention Grant
US08853544B2 Method of transferring thin film components and circuit board having the same 有权
传送薄膜部件的方法和具有该薄膜部件的电路板

Method of transferring thin film components and circuit board having the same
Abstract:
Various aspects of the present invention provide a transfer method for peeling off an MIM structure (comprising lower electrode/dielectric layer/upper electrodes) film formed on a supporting substrate and then transferring onto a transfer substrate with sufficiently uniform and low damage. Various aspects of the present invention also provide a thin film element provided with one or more thin film components which are transferred onto a substrate by using said method.
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