Invention Grant
- Patent Title: Device for irradiating a laser beam
- Patent Title (中): 用于照射激光束的装置
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Application No.: US11983103Application Date: 2007-11-06
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Publication No.: US08853590B2Publication Date: 2014-10-07
- Inventor: Hyun-Jae Kim , Myung-Koo Kang
- Applicant: Hyun-Jae Kim , Myung-Koo Kang
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Innovation Counsel LLP
- Priority: KR10-2002-0064511 20021022
- Main IPC: B23K26/00
- IPC: B23K26/00 ; G03B27/52 ; H01L21/20 ; B23K26/02 ; H01L29/786 ; B23K26/06 ; H01L29/66 ; H01L27/12 ; H01L21/02
Abstract:
A device for irradiating a laser beam onto an amorphous silicon thin film formed on a substrate. The device includes: a stage mounting the substrate; a laser oscillator for generating a laser beam; a projection lens for focusing and guiding the laser beam onto the thin film; a reflector for reflecting the laser beam guided onto the thin film; a controller for controlling a position of the reflector; and an absorber for absorbing the laser beam reflected by the reflector.
Public/Granted literature
- US20080070386A1 Device for irradiating a laser beam Public/Granted day:2008-03-20
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