Invention Grant
- Patent Title: Electron microscope
- Patent Title (中): 电子显微镜
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Application No.: US14130919Application Date: 2012-05-16
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Publication No.: US08853647B2Publication Date: 2014-10-07
- Inventor: Takeshi Ogashiwa , Masahiro Akatsu
- Applicant: Takeshi Ogashiwa , Masahiro Akatsu
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2011-157407 20110719
- International Application: PCT/JP2012/003177 WO 20120516
- International Announcement: WO2013/011612 WO 20130124
- Main IPC: G21K5/10
- IPC: G21K5/10 ; G21K5/08 ; H01J37/26 ; H01J37/28

Abstract:
Provided is an electron microscope on which a specimen holder to have high voltage applied is mountable. The specimen holder has safety (electric shock prevention) features, and attention is paid to the specimen holder in terms of operability. The microscope includes a specimen holder having a function of applying a voltage to a specimen mount disposed to load a specimen, a voltage source that supplies the voltage to be applied to the specimen mount, a voltage cable connected at one end thereof to the specimen holder, and a relay unit to which the other end of the voltage cable is connected, the relay unit being placed on a supporting base that supports a lens barrel of the electron microscope.
Public/Granted literature
- US20140151555A1 ELECTRON MICROSCOPE Public/Granted day:2014-06-05
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